Fraunhofer Institute for Electron Beam
and Plasma Technology FEP
Fraunhofer Institute for Electron Beam
and Plasma Technology FEP

Brochures

Here you will find our current brochures, annual reports and the profile of the Institute.

Profile/ Annual Reports

Profile
Annual Report 2023/24
Annual Report 2022/23
Annual Report 2021/22
Annual Report 2020/21
Annual Report 2019/20
Annual Report 2018/19
Annual Report 2017/18
Annual Report 2016/17
Annual Report 2015/16

Technologies

High-rate deposition of pure silicon layers
Plasma-activated high-rate deposition
Pulse Magnetron Sputtering
Sensors
Sputter etching
Surface technologies for medical applications
Ultra high-rate PECVD for large area applications

Services

Biomedical Laboratory Complex
Characterization of thin films, components and surfaces
Process-oriented development of control and power electronics for electron beam and plasma sources
Systems

Business Units

Coating of flat substrates
Coating of flexible products
Coating of metal sheets and strips
Precision coating

Topics

Cleaning – Disinfection – Sterilization
Coatings | Research and Development: Applications – Materials – Substrates – Technologies – Systems
Electron Beam and Plasma Technologies for Hydrogen
Permeation Barriers
Technologies for automotive industry
Thin film technology for energy storage media

Hardware

Double Ring Magnetron - DRM 400
Easy Beam
LAVOPLAS
UBS-C2

Experimental and pilot plants

ALMA 1000 - Experimental plant for coating bulk goods
atmoFlex 1250 – Roll-to-Roll pilot wet coating line
CLAIRE – In-line plant for wet chemical surface treatmant prior to coating
CLUSTER 300 – Experimental plant for stationary magnetron sputtering
coFlex® 600 – Roll-to-Roll pilot sputter roll coater
EFFI – Electron beam machine for surface structuring
ELLI 300 – Experimental plant for the treatment of liquids with low-energy accelerated electrons
EMO – Laboratory coater with EB evaporator

ERICA – Vacuum cluster tool for complex coating and structuring processes
ILA 750 – Vertical In-line sputtering plant
ILA 900 – Vertical In-line sputtering plant for coating large surfaces
labFlex® 200 – Lab sputter roll coater
MAXI – In-line vacuum coating equipment for sheets and metal strips
nanoFlex – Laboratory pilot plant
NOVELLA – Pilot plant for the coating of components
novoFlex® 600 – Roll-to-Roll pilot web coater

PreSensLine – In-line sputtering system for precious coating of large substrates
REAMODE – Experimental equipment for modifying organic materials
Roll-to-Roll inspection system
UNIVERSA – Laboratory coater for layer deposition
VERSA – Pilot plant for plasma-activated electron beam vapor deposition

Products

Advanced transparent conductive coatings on flat and flexible substrates
Antimicrobial surfaces
Bioleaching of metals from raw materials and residues
Clear Barrier Films for Packaging Applications
Coating of small and massproduced components as bulk goods
Crystalline titanium dioxide layers
Decellularization, UVA treatment, sterilization
Electrically insulating coatings

Electron treatment of seeds
Electron beam curing of lacquers
Electron beam modification of polymers
Energy Harvesting
Functionalized ultra-thin flexible glass
Induction evaporation for the coating of plastic films
Large area anti-reflective coatings
Nachweismöglichkeiten für desinfiziertes Saatgut [DE]

Processing thin metal films in the vacuum coating line MAXI
PVD coating of metal stripes and sheets
Refinement of thin-films by in-line Flash Lamp Annealing
Restoration of historical mirrors
Silver and copper together effective against bacteria
Sterilization of biological tissues with electrons
Surface modification for medical engineering
Thin-film corrosion sensors for monitoring of sensitive objects

Transparent scratch-resistant layers on large area substrates
Vacuum technologies for next generation solar cells

White Paper