Fraunhofer Institute for Electron BeamThe institute is equipped with several pilot plants for large-area coating (batch, in-line or roll-to-roll processes), electron beam equipment for the efficient modification of surfaces and several clean rooms for the development and pilot production of organic electronics, sensors and microdisplays. Using these plants we can refine flat substrates made from glass, plastics or metal as well as flexible surfaces like metal strips, polymer films or flexible ultra-thin glass as well as 3-dimensional components. The equipment technology in the clean rooms enables coating on 200 mm wafers as well as on glass or film substrates up to 200 x 200 mm² with e. g. organic electronics.
Equipment
Coating of flexible substrates
| novoFlex®600 | Roll-to-roll pilot web coater |
| coFlex® 600 | Roll-to-roll pilot sputter roll coater |
| labFlex® 200 | Lab sputter roll coater |
| atmoFlex 1250 | Roll-to-roll pilot wet coating line |
| FOSA LabX 330 Glass | Web coating system for flexible substrates (in cooperation with VON ARDENNE GmbH) |
Electron beam applications
| REAMODE | Experimental equipment for modifying organic materials using accelerated electrons |
| ERICA |
Vacuum cluster tool for complex coating and structuring processes |
| EFFI |
Electron beam machine for surface structuring and for fine and micro welding processes |
| CLAIRE | In-line plant for wet chemical surface treatment prior to coating |
| TABEA | Mobile test rig for electron beam-based environmental technologies |
Precision coating
| CLUSTER 300 |
Plant for stationary magnetron sputtering |
| PreSensLine | In-line sputtering system for precision coating of large substrates |
Parts of the equipment have been funded by the European Union and the Free State of Saxony.
